The physical and chemical properties of matter depend on temperature, and the ability to control or measure temperature at the nanometer scale enables new technologies for nano-manufacturing and materials characterization. Heated atomic force microscope (AFM) cantilevers can reach temperature above 1000 °C within few microseconds. The heated tip can be used as a nano hotspot for a wide range of thermal applications. This talk introduces the recently developed state of the art heated AFM cantilevers and their novel applications in sensing and nano-manufacturing. The first part of the talk describes the development of heated cantilever arrays for high throughput parallel imaging and nano-manufacturing. The second part of the talk describes the integration of advanced materials, such as diamond and graphene, onto heated AFM cantilevers to improve the device stability and functionality. Lastly, the talk describes the integration of the micro-heater with laterally vibrating piezoelectric MEMS resonators for temperature stable oscillator applications.

6. 약  력 : 

  Working Experience

  2015- Present   Postdoctoral Research Associate, Carnegie Mellon University

                     Electrical and Computer Engineering (Advisor: Gianluca Piazza)

  Education

  2015 / Ph.D. University of Illinois at Urbana-Champaign, Mechanical Science and Engineering (Advisor: Prof. William P. King)

  2011 / M.S.  University of Illinois at Urbana-Champaign, Mechanical Science and Engineering (Advisor: Prof. William P. King)

   2009  /   B.S.   Johns Hopkins University, Mechanical Engineering, Applied Mathematics and Statistics